COATING SOLUTION OF MULTI-COMPONENT OXIDE SEMICONDUCTOR PRECURSOR AND PROCESS FOR MANUFACTURING MULTI-COMPONENT OXIDE SEMICONDUCTOR FILM USING SAID COATING SOLUTION

摘要

The present invention provides a coating solution of a multi-component oxide semiconductor precursor, said coating solution being capable of forming a film or a pattern by a high-viscosity-necessitating method such as screen printing or transfer printing or a medium-viscosity-necessitating method such as gravure printing or flexography. The formed film or pattern can be converted through firing into a transparent oxide semiconductor film having electrically semiconducting characteristics. The coating solution is prepared by: adding a hydroxyl-bearing amine or an oxygen-containing heterocyclic amine as a main organic solvent to an aqueous solution prepared by dissolving multiple metal salts and urea in water; stirring the obtained mixture; and heating the resulting mixture at ordinary pressure at a temperature of 100ºC to the boiling point of the main organic solvent to form a coating solution which contains a multi-component oxide semiconductor precursor and which exhibits a viscosity of 0.5Pa·s or more at room temperature.