METHOD FOR PRODUCING LAYERED POLISHING PADS

摘要

This method for producing layered circular polishing pads includes: a step for forming, on a circular polishing sheet, concentric grooves and a peripheral area that is at least 1/2 of the groove pitch of the concentric grooves; and a step for producing a layered polishing sheet obtained by bonding the circular polishing sheet and a support layer with an adhesive member therebetween. The method for producing layered polishing pads is capable of providing a method for producing layered circular polishing pads wherein a polishing layer and a support layer are not prone to peeling.