| 摘要 |
A microbarometer with a bellows comprises a reference base 11, a bellows 12 of which one edge is fixed to a reference surface of said base, having an elongation direction perpendicular to this reference surface, a cover 13 closing the other edge of this bellows so as to sealingly insulate it from the outside, the bellows being placed in conditions in which the variations in elongation of same are directly proportional to the pressure variations induced by infrasonic waves around it; it further comprises a reflective element 14 integral with this cover and an interferometric component 16 designed to be able to receive a beam from a source and integral with the reference surface of the base, having an input/output optical path facing the reflective element, parallel to the elongation direction of the bellows, so as to be able to emit a beam fraction towards this element and to sense this beam after reflection on this reflective element, this component comprising optical guide lines, and optical separation and combination areas within a same substrate, using integrated technology. |
