| 摘要 |
<p>A method for compensating an orthogonal degree of a length measuring device, and a length measuring device using same. The method comprises the following steps: Step 1, providing a measuring machine table (20) and multiple alignment marks (40), wherein the measuring machine table (20) comprises a frame (22), a rectangular measuring platform (24) arranged on the frame (22), a measuring microscope (26) arranged above the measuring platform (24), and a laser (28) arranged on the frame and connected with the measuring microscope (26); Step 2, arranging the alignment marks (40) on the measuring platform (24), and recording coordinates of the alignment marks (40) corresponding to a coordinate system of the measuring platform as reference coordinate values; Step 3, reading real coordinate values of the alignment marks (40) corresponding to the coordinate system of the measuring platform through the measuring microscope (26), and comparing the real coordinate values with the reference coordinate values; and Step 4, if the real coordinate values and the reference coordinate values have deviation, compensating the real coordinate values so that the real coordinate values are equal to the reference coordinate values.</p> |
