| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a small and light mass spectroscope capable of analyzing mass at high accuracy.SOLUTION: A mass spectroscope comprises: an ion source 101 for ionizing gas 23 flowing from outside to ionize a measurement sample 4; and a mass analyzing part 102 for separating the ionized measurement sample 4. Internal pressure of the ion source 101 is reduced by differential evacuation from the mass analyzing part 102. The ion source 101 takes in the gas 23 to increase the internal pressure, and ionizes the gas 23 when the internal pressure is about 100 Pa to about 10000 Pa. The mass analyzing part 102 separates the ionized measurement sample 4 when the internal pressure increased while taking in the gas 23 is reduced to about 0.1 Pa or less after taking in the gas 23. The mass spectroscope comprises: restraining means 9 for restraining a flow rate of the gas 23 taken in by the ion source 101; and opening/closing means 8 for opening/closing a flow of the gas 23 taken in by the ion source 101.</p> |
