METHOD OF MANUFACTURING SOLAR CELL ABSORPTION LAYER AND HEAT PROCESSING DEVICE OF THE SAME

摘要

PROBLEM TO BE SOLVED: To disclose a method of manufacturing a solar cell absorption layer and a heat processing device of the same configured to form an absorption layer on a substrate.SOLUTION: The method of manufacturing a solar cell absorption layer includes steps of: maintaining a solid phase vapor source and an absorption layer precursor on a substrate in a chamber at a predetermined distance. The solid phase vapor source contains tin. The absorption layer precursor contains copper, zinc, tin, and sulfur. Temperature in the chamber is raised to a formation temperature so that the absorption layer precursor forms an absorption layer on the substrate.