METHOD FOR QUANTIFYING ADSORPTION OF TRACE AMOUNT OF WATER MOLECULE TO THIN FILM BY USE OF REFLECTOMETRIC INTERFERENCE SPECTROSCOPY, AND MEASUREMENT SYSTEM FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide means capable of analyzing a behavior of water molecules to a thin film made of various materials, from a viewpoint different from the prior arts.SOLUTION: There is provided an analyzing method relating to a behavior of gaseous water molecules with respect to a sample thin film including a step of measuring data (measurement step) relating to a film thickness of the sample thin film by RIfS (reflectometric interference spectroscopy) while continuously or discontinuously changing the humidity of the environment where the sample thin film formed on a surface of a measurement substrate is placed. A RIfS measurement system including humidity adjusting means for continuously changing the humidity of the environment where the sample thin film formed on a surface of a sensor chip is placed is also.provided.