发明名称 |
SEMICONDUCTOR PROCESSING ASSEMBLY AND FACILITY |
摘要 |
<p>A semiconductor processing assembly, comprising at least one semiconductor processing system and a substrate cassette stocker with stocker positions that are at least partially disposed within a footprint of the at least one semiconductor processing system. The semiconductor processing system also includes a local substrate cassette transport system for exchanging substrate cassettes with a global cassette transport system of a processing facility. The local substrate cassette transport system transports cassettes between its substrate cassette exchange station and the stocker positions. Also disclosed is a semiconductor processing facility, having a clean room bay area and a clean room chase area, disposed adjacent to the clean room bay area and separated therefrom by a clean room bounding wall. The facility also includes a semiconductor processing assembly having at least two semiconductor processing systems and a local substrate cassette transport system for transporting substrate cassettes between the semiconductor processing systems.</p> |
申请公布号 |
WO2014104895(A1) |
申请公布日期 |
2014.07.03 |
申请号 |
WO2013NL50962 |
申请日期 |
2013.12.31 |
申请人 |
ASM IP HOLDING B.V. |
发明人 |
OOSTERLAKEN, THEODORUS G.M.;DE RIDDER, CHRIS G.M.;VAN KESTEREN, TOM A.;JONGBLOED, BERT;VAN GARSSEN, ADRIAAN |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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