| 摘要 |
PROBLEM TO BE SOLVED: To enable high-precision aberration correction.SOLUTION: Aberration is measured as phase information at each of a plurality of aberration measurement points. When the aberration is corrected by correction pixels of a larger number of aberration correction means than the number of the plurality of aberration measurement points, the correction pixel corresponding to each aberration measurement point is driven on the basis of the phase information, and the correction pixel, which does not positionally correspond to the aberration measurement point, drives the aberration correction means on the basis of the phase information near the correction pixel. |
