PRE SPACE TRANSFORMER, SPACE TRANSFORMER MANUFACTURED USING THE PRE SPACE TRANSFORMER, AND SEMICONDUCTOR DEVICE INSPECTING APPARATUS INCLUDING THE SPACE TRANSFORMER

摘要

PROBLEM TO BE SOLVED: To provide a pre space transformer, a space transformer manufactured using the pre space transformer, and a semiconductor device inspecting apparatus including the space transformer.SOLUTION: Disclosed herein is a pre space transformer including a substrate having a first surface and a second surface which is an opposite surface to the first surface, and signal electrodes, power electrodes, and ground electrodes disposed on the first surface, wherein the signal electrodes, the power electrodes, and the ground electrodes are repeatedly disposed while forming a unit pattern.