TUNABLE CAPACITOR

摘要

A tunable capacitor includes a substrate, a movable member, a first capacitive plate, a second capacitive plate, a third capacitive plate and a set of electrode plates. The movable member is disposed on the substrate. The movable member is adapted for moving away or toward the substrate to have a first position and a second position, respectively. The first capacitive plate is disposed on the movable member and faces the substrate. The second capacitive plate and the third capacitive plate are disposed on the substrate and face the first capacitive plate. The set of electrode plates, disposed on the substrate, faces the at least one movable member. The set of electrode plates, driven by an electrical voltage, generates electrostatic force causing the movable member to be drawn from the first position to the second position thereof to correspondingly adjust capacitance between the capacitive plates.

主权项

1. A tunable capacitor, comprising:
a substrate; at least one movable member disposed on the substrate, wherein the at least one movable member is adapted for moving away or toward the substrate to have a first position and a second position, respectively; a first capacitive plate disposed on the at least one movable member and facing the substrate; a second capacitive plate disposed on the substrate and facing the first capacitive plate; a third capacitive plate disposed on the substrate and facing the first capacitive plate; and at least one set of electrode plates disposed on the substrate and facing the at least one movable member, wherein the set of electrode plates, driven by an electrical voltage, generates electrostatic force causing the at least one movable member to be drawn from the first position to the second position thereof to correspondingly adjust capacitance between the first capacitive plate and the second capacitive plate as well as the first capacitive plate and the third capacitive plate, respectively.