| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter removing device which can efficiently remove foreign matter and which achieves further simplification of its configuration.SOLUTION: A foreign matter removing device 1A includes: a removing needle removing foreign matter 2a on a base plate 2; and an observation part 13 which includes a holding part (having a linear motion bearing 24, a linear motion actuator 25, and a body base 26) holding the removing needle 21, and an objective lens 13b observing the foreign matter 2a. The removing needle 21 and the holding part can integrally move relatively to the base plate 2 in an in-plane direction of the base plate 2, and can move relatively to each other in such a direction that the removing needle 21 comes close to the base plate 2. The removing needle 21 can be positioned in a visual field of the objective lens 13b. |
