| 发明名称 |
INSPECTION SYSTEM, INSPECTION METHOD, PIXEL CIRCUIT AND IMAGE SENSOR |
| 摘要 |
An inspection system includes a CIGS camera configured to generate a visible light image and an infrared light image of an inspection object by imaging visible light and infrared light simultaneously on the same optical axis using a CIGS image sensor, and an inspection apparatus configured to inspect the inspection object based on the visible light image and the infrared light image. |
| 申请公布号 |
US2014184810(A1) |
申请公布日期 |
2014.07.03 |
| 申请号 |
US201314140990 |
申请日期 |
2013.12.26 |
| 申请人 |
ROHM CO., LTD. |
发明人 |
SEKIGUCHI Hiroshi |
| 分类号 |
G01N21/95;H04N5/33;H01L27/146 |
主分类号 |
G01N21/95 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An inspection system comprising:
a CIGS camera configured to generate a visible light image and an infrared light image of an inspection object by imaging visible light and infrared light simultaneously on the same optical axis using a CIGS image sensor; and an inspection apparatus configured to inspect the inspection object based on the visible light image and the infrared light image. |
| 地址 |
Kyoto JP |
