发明名称 |
RESONANT SENSOR WITH ASYMMETRIC GAPPED CANTILEVERS |
摘要 |
A resonant sensor is provided. The resonant sensor may have a structure including a base portion, a mass portion, and a mechanical beam connecting the base portion to the mass portion. In addition, the structure may include a first sensing beam formed from a sensing material responsive to mechanical strain where a gap is formed between the sensing beam and the mechanical beam. |
申请公布号 |
US2014183669(A1) |
申请公布日期 |
2014.07.03 |
申请号 |
US201113637325 |
申请日期 |
2011.03.25 |
申请人 |
Xu Yong;Zeng Qinglong;Hu Yating;Li Yefa;Tu Hongen |
发明人 |
Xu Yong;Zeng Qinglong;Hu Yating;Li Yefa;Tu Hongen |
分类号 |
B81B3/00;B81C1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
1. A resonant sensor comprising:
a structure including a base portion, a mass portion, and a mechanical beam connecting the base portion to the mass portion; a first sensing beam formed from a sensing material responsive to mechanical strain; a gap being formed between the sensing beam and the mechanical beam. |
地址 |
Troy MI US |