发明名称 RESONANT SENSOR WITH ASYMMETRIC GAPPED CANTILEVERS
摘要 A resonant sensor is provided. The resonant sensor may have a structure including a base portion, a mass portion, and a mechanical beam connecting the base portion to the mass portion. In addition, the structure may include a first sensing beam formed from a sensing material responsive to mechanical strain where a gap is formed between the sensing beam and the mechanical beam.
申请公布号 US2014183669(A1) 申请公布日期 2014.07.03
申请号 US201113637325 申请日期 2011.03.25
申请人 Xu Yong;Zeng Qinglong;Hu Yating;Li Yefa;Tu Hongen 发明人 Xu Yong;Zeng Qinglong;Hu Yating;Li Yefa;Tu Hongen
分类号 B81B3/00;B81C1/00 主分类号 B81B3/00
代理机构 代理人
主权项 1. A resonant sensor comprising: a structure including a base portion, a mass portion, and a mechanical beam connecting the base portion to the mass portion; a first sensing beam formed from a sensing material responsive to mechanical strain; a gap being formed between the sensing beam and the mechanical beam.
地址 Troy MI US