发明名称 LIQUID JET HEAD, LIQUID JET DEVICE, PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a liquid jet head, a liquid jet device, a piezoelectric element, and a piezoelectric element manufacturing method capable of suppressing release of electrodes and a wiring layer.SOLUTION: A liquid jet head includes: a channel formation substrate 10 that includes a pressure generation chamber 12 communicating with a nozzle opening 21 from which liquid is jet; and a piezoelectric element 300 that is provided on the channel formation substrate 10, and that includes a piezoelectric layer 70, electrodes 60 and 80, and a wiring layer 90 connected to the electrodes 60 and 80. The wiring layer 90 includes: a closely attached layer 191 containing at least one selected from a group consisting of nickel, chromium, titanium, and tungsten; and a conductive layer 192 provided on the closely attached layer 191. An insulating film 200 having an insulating property is provided at least between the wiring layer 90 on the electrodes 60 and 80 and the electrodes 60 and 80. The electrodes 60 and 80 of the piezoelectric element 300 are connected to the wiring layer 90 thereof via contact holes 201 and 202 provided in the insulating film 200.
申请公布号 JP2014121799(A) 申请公布日期 2014.07.03
申请号 JP20120277758 申请日期 2012.12.20
申请人 SEIKO EPSON CORP 发明人 HIRAI EIKI;KIMURA KIYOKA
分类号 B41J2/045;B41J2/055;B41J2/16;H01L41/09;H01L41/18;H01L41/187;H01L41/22 主分类号 B41J2/045
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