| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser machining apparatus which can inhibit readhesion of debris generated during laser machining to a workpiece.SOLUTION: A laser machining apparatus 1 includes a chuck table 10 which holds a workpiece W, laser beam irradiating means 20 which irradiates a laser beam L to the surface WS of the workpiece W, and debris discharge means 40. The debris discharge means 40 includes a suction passage 45, a liquid storage part 42, and an effluent debris detector 43. The suction passage 45 extends diagonally upward from a suction port 44 to communicate with a suction source 46. The liquid storage part 42 is installed on a bottom surface 45a in the vicinity of the suction port 44 of the suction passage 45, and stores a liquid debris D2 which reversely flows down on the bottom surface 45a. The effluent debris detector 43 is installed in the vicinity of the liquid storage part 42 between the liquid storage part 42 and the suction port 44 of the suction passage 45, and detects the liquid debris D2 which flows backward to the suction port 44 when exceeding the storage amount of the liquid storage part 42. |
