MULTI-DOPANT PERMEATION TUBE

摘要

Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber 5 and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.

主权项

1. A dopant delivery device configured to supply dopants to a spectrometry system, the dopant delivery device comprising:
a tube including:
a first chamber defined by a first portion of a wall of the tube, anda second chamber defined by a second portion of the wall of the tube; a first plug disposed within the tube, the first plug separating the first chamber from the second chamber; a first dopant source included in the first chamber; and a second dopant source included in the second chamber.