| 摘要 |
PROBLEM TO BE SOLVED: To provide a light-deflection module for a wavelength selection switch, which is suitable for inexpensively constituting a wavelength selection switch.SOLUTION: A light-deflection module 10 for a wavelength selection switch includes a support substrate 11 and an MEMS mirror array chip 12 mounted on the support substrate 11. The MEMS mirror array chip 12 includes a plurality of movable mirrors 15 and an electrode substrate 32. The electrode substrate 32 includes a drive electrode 41 for driving the movable mirrors 34. The coefficient of linear expansion of the support substrate 11 is smaller than the coefficient of linear expansion of the electrode substrate 32. |
