| 发明名称 |
In-Line Transistor Bandwidth Measurement |
| 摘要 |
A method and apparatus measure transistor bandwidth of a device under test in-line and on-wafer. The method includes disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer, and obtaining an amplitude gain based on the measurement circuit for the corresponding frequency. |
| 申请公布号 |
US2014184242(A1) |
申请公布日期 |
2014.07.03 |
| 申请号 |
US201313732474 |
申请日期 |
2013.01.02 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
Hedberg Erik L.;Kim Daeik D.;Lea Dallas M.;Sutton Akil K.;Zier Steven J. |
| 分类号 |
G01R31/26 |
主分类号 |
G01R31/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of measuring transistor bandwidth of a device under test in-line and on-wafer, the method comprising:
disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer; and obtaining an amplitude based on the measurement circuit for the corresponding oscillation frequency. |
| 地址 |
Armonk NY US |
