| 发明名称 |
VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, MOVING OBJECT, AND METHOD OF MANUFACTURING VIBRATOR |
| 摘要 |
An MEMS vibrator includes a substrate, a fixation section disposed above a principal surface of the substrate, a support section extending from the fixation section, and a vibrating body (an upper electrode) separated from the substrate and supported by the support section in a node part of a vibration, and the vibrating body is a 2n-fold rotationally symmetric body having 2n beams radially extending from a node part of a vibration, wherein n is a natural number. |
| 申请公布号 |
US2014184018(A1) |
申请公布日期 |
2014.07.03 |
| 申请号 |
US201314132475 |
申请日期 |
2013.12.18 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
Inaba Shogo;Yamada Akinori;Yajima Aritsugu |
| 分类号 |
H02N1/00;H03H3/00 |
主分类号 |
H02N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vibrator comprising:
a substrate; a fixation section disposed above a principal surface of the substrate; a support section extending from the fixation section; and a vibrating body separated from the substrate and supported by the support section in a node part of a vibration, wherein the vibrating body is a 2n-fold rotationally symmetric body having 2n beams extending from the node part of the vibration, wherein n is a natural number. |
| 地址 |
Tokyo JP |
