| 摘要 |
A method and apparatus for scanning an integrated circuit comprising a plurality of time-synchronized laser microscopes, each of which is configured to scan the same field of view of an integrated circuit under test that generates a plurality of images of the integrated circuit under test, a data processor, coupled to the laser scanning microscope, for processing the plurality of images, comprising, a netlist extractor (NE) that produces one or more netlists defining structure of the integrated circuit under test. |
