METHOD FOR MANUFACTURING THERMALLY CONDUCTIVE PRESSURE-SENSITIVE ADHESIVE SHEET, AND THERMALLY CONDUCTIVE PRESSURE-SENSITIVE ADHESIVE SHEET

摘要

This method for manufacturing a thermally conductive pressure-sensitive adhesive sheet includes the following steps: a step (I) in which a thermally conductive sheet that contains a fluorine resin and a thermally conductive filler is formed, said thermally conductive filler constituting 40% to 90% of the volume of the thermally conductive sheet; and a step (II) in which sputter etching is performed on one or both surfaces of the thermally conductive sheet and a pressure-sensitive adhesive layer or layers is/are then formed on the sputter-etched surface(s) of the thermally conductive sheet. This thermally conductive pressure-sensitive adhesive sheet contains the following: a thermally conductive sheet that contains a fluorine resin and a thermally conductive filler, said thermally conductive filler constituting 40% to 90% of the volume of the thermally conductive sheet; and a pressure-sensitive adhesive layer or layers provided on one or both surfaces of the thermally conductive sheet. Part of the thermally conductive filler is exposed across at least 50% of the surface area of the surface(s) of the thermally conductive sheet on which the pressure-sensitive adhesive layer(s) is/are provided.