INFRARED FOCAL PLANE ARRAY HEAT SPREADERS

摘要

In one embodiment, an infrared (IR) sensor module includes an IR sensor assembly (128), including a substrate (140), a microbolometer array (132) disposed on an upper surface of the substrate; and a cap (130)disposed on the upper surface of the substrate and hermetically enclosing the microbolometer array. A base (150) is disposed below the substrate, and a heat spreader (1400) having a generally planar portion is interposed between a lower surface of the substrate and an upper surface of the base. In some embodiments, the heat spreader can include a material having an anisotropic thermal conductivity, e.g., graphite.