发明名称 Diffusion chamber, useful for thermal treatment of substrate of copper indium gallium selenide thin film solar cell, comprises vacuum chamber, and two half-shells arranged within vacuum chamber
摘要 <p>The diffusion chamber (1) comprises a vacuum chamber (2), and two half-shells (11, 12) arranged within the vacuum chamber. A heater (31) is provided in one of the half-shells. One of the half-shells has an inlet (4) for the process gas and the other of the two half-shells a gas outlet (5). The inlet and/or the outlet are heated pipelines. Walls of the vacuum chamber are thermally insulated. A transport device (50) has a substrate carrier (41) for transporting a substrate (40). The substrate carrier is provided with a set of gas passage holes (42) on its circumference. The diffusion chamber (1) comprises a vacuum chamber (2), and two half-shells (11, 12) arranged within the vacuum chamber. A heater is provided in one of the half-shells. One of the half-shells has an inlet (4) for the process gas and the other of the two half-shells has a gas outlet (5). The inlet and/or the outlet are heated pipelines. Walls of the vacuum chamber are thermally insulated. A transport device has a substrate carrier for transporting a substrate into or out of the diffusion chamber. The substrate carrier is provided with a set of gas passage holes on its circumference. The diffusion chamber further comprises a thermal vaporizer as a process gas source. A unit supplies inert gas into the vacuum chamber. The heater heats the substrate, and comprises a set of plate-shaped heating devices, where the plate-shaped heating devices form a heating zone. The diffusion chamber further comprises a unit for monitoring the temperature of the substrate, where the monitoring unit comprises an infrared radiation measuring device i.e. pyrometer, where the heating power of the heating device is controlled in a closed loop to achieve a homogenous temperature setting.</p>
申请公布号 DE102012224500(A1) 申请公布日期 2014.07.03
申请号 DE201210224500 申请日期 2012.12.28
申请人 SINGULUS TECHNOLOGIES AG 发明人 CORD, BERNHARD;KLEPL, ANDREAS;SCHMITT, KARL
分类号 H01L21/223;C30B31/10;H01L31/18 主分类号 H01L21/223
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