MEASURING METHOD, MANUFACTURING METHOD OF ORIENTED CARBON NANOTUBE ASSEMBLY, AND MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To measure height of an oriented carbon nanotube assembly suppressing influence such as warping and deflection of a substrate without cutting, even if the substrate has a large area.SOLUTION: A method includes steps of: measuring a distance L1 from a reference surface S0 to a surface S1 of metal substrate 10 using an eddy current type displacement sensor 102; measuring a distance L2 from reference surface S0 to tip S2 of a CNT oriented assembly 20 using a laser displacement sensor 103; and calculating a height by formula T=L1-L2.