发明名称 |
NON-CONTACT MEASURING METHOD AND APPARATUS OF SEEBECK COEFFICIENT |
摘要 |
The present invention relates to a method and an apparatus for measuring a non-contact seebeck coefficient of a thermoelectric material and, more specifically, to a method and an apparatus for measuring a non-contact seebeck coefficient, capable of measuring a precise seebeck coefficient of a thin film having a thickness thinner than one micrometer through a non-contact temperature measurement. |
申请公布号 |
KR101408681(B1) |
申请公布日期 |
2014.07.02 |
申请号 |
KR20130020626 |
申请日期 |
2013.02.26 |
申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
HAN, SEUNG WOO;PARK, HYUN SUNG;WOO, CHANG SU |
分类号 |
G01N25/18;H01L35/34 |
主分类号 |
G01N25/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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