| 摘要 |
PURPOSE: A substrate processing system is provided to maximize space efficiency by successively supplying a substrate to each process chamber according to a process sequence with a stepping operation. CONSTITUTION: A plurality of openings(11) are formed in a sidewall of a main chamber(10). A plurality of process chambers(30) are formed in the outside of the opening of the main chamber. A transfer chamber(50) is formed in the main chamber. The transfer chamber supplies the substrate to the process chamber. A gate valve(G) is formed between the main chamber and the process chamber to open and close the opening. |
