| 摘要 |
PURPOSE: A susceptor assembly is provided to change a helium gas inlet when a helium gas supply port is damaged without changing a whole insulating layer. CONSTITUTION: A susceptor(100) is composed of a plurality of layers. A helium gas supply path is formed through the layers. The helium gas inlet is installed on the susceptor to be connected to the helium gas supply path. The helium gas inlet is removable. The helium gas inlet injects helium gas. An insulator(430) forms a helium gas transfer path which is connected to the helium gas supply path. A helium gas supply baffle(420) exhausts helium gas which is transferred through the helium gas transfer path. |
