| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transfer device transferring a pattern with high accuracy to a partitioned area provided on a strip type substrate. <P>SOLUTION: The transfer device (EX) includes: a conveyance mechanism including a transporting device (FR, WR) holding a substrate (FB) and transporting it in a longitudinal direction, and a stage device (FBS) holding a part of the substrate (FB) held by the transporting device (FR, WR) and moving along the surface of the substrate (FB); a detecting device (LSA) irradiating the substrate (FB) moved by the conveyance mechanism with measurement light and detecting the diffracted light from a plurality of marks (AM) provided on the substrate (FB) along the moving direction of the substrate by the conveyance mechanism; a computing device calculating the information on the deformation of a partitioned area (EA) based on the detection results by the detecting device (LSA); and a correcting device correcting a pattern based on the calculated information by the computing device. <P>COPYRIGHT: (C)2010,JPO&INPIT |
