| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate fixing mechanism which is capable of accurately fixing the position of a substrate in spite of easily mounting the substrate without need to manufacture the mechanism with high dimension precision and need to highly accurately controlling the position or attitude of the substrate when mounting the substrate. SOLUTION: In a substrate fixing mechanism, a substrate clamp 1a is disposed which includes: an air pressure cylinder 2 in which pistons 21 and 22 having the same piston cross-sectional area are disposed oppositely with a cylinder chamber 23 therebetween; a placement pawl 3 which is drawn by the piston 21 via a driver 5 and can be moved oppositely to a substrate; a substrate pressing pawl 4 which is pushed by the piston 22 and can be moved toward the substrate; an energizing body 7 for a pressing pawl which energizes the substrate pressing pawl 4 oppositely to the substrate; an energizing body 6 for a placement pawl which energizes the placement pawl 3 toward the substrate with further greater energizing force; engaging portions 31a and 31b added to the placement pawl 3; and an engage abutting portion 41 added to the substrate pressing pawl 4 which is abutted to the engaging portions 31a and 31b when the placement pawl 3 is protruded from the substrate pressing pawl 4 just by a predetermined width. COPYRIGHT: (C)2012,JPO&INPIT |
