发明名称 Device for measuring a pressure with at least one pressure sensor with at least one active sensor surface
摘要 The device (1) has a pressure sensor (2) that is provided with an active sensor area (3). The active sensor area is arranged opposite to a vibrating and/or temperature changing mating surface (4). The active sensor area and the vibrating and/or temperature changing mating surface are arranged in a hollow portion (8). The hollow portion is provided with the openings (10,11) and an alternating current (AC) signal amplifier (14). The side walls (6,7) are arranged on a support (5) of the vibrating and/or temperature changing mating surface.
申请公布号 EP2749857(A2) 申请公布日期 2014.07.02
申请号 EP20130192814 申请日期 2013.11.14
申请人 PFEIFFER VACUUM GMBH 发明人 CONRAD, ARMIN
分类号 G01L11/00;G01L9/00;G01L13/00;G01L19/02;G01L27/00 主分类号 G01L11/00
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