发明名称 |
MICROSYSTEM AND METHOD FOR POSITIONING A SECOND ELEMENT WITH RESPECT TO A FIRST ELEMENT IN A MICROSYSTEM |
摘要 |
<p>A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.</p> |
申请公布号 |
EP1799612(B1) |
申请公布日期 |
2014.07.02 |
申请号 |
EP20050791710 |
申请日期 |
2005.09.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DESPONT, MICHEL;DÜRIG, URS, T.;GOTSMANN, BERND, W. |
分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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