THIN FILM ENCAPSULATION MANUFACTURING DEVICE AND MANUFACTURING METHOD OF THIN FILM ENCAPSULATION

摘要

Disclosed are a thin film encapsulation manufacturing device and a thin film encapsulation manufacturing method. The present invention includes a first cluster which forms a first inorganic layer by performing a sputtering process on a display substrate, and a second cluster which forms a first organic layer by performing a monomer deposition process on the first inorganic layer transferred from the first cluster, and a third cluster which forms a second inorganic layer by performing a chemical deposition process or plasma chemical vapor deposition process on the first organic layer transferred from the second cluster.