发明名称 |
METHOD OF MODIFYING SURFACES |
摘要 |
<p>The invention provides a method for chemically modifying a surface of a substrate, preferably a silicon substrate, including the steps of providing a substrate having at least a portion of a surface thereof coated with an organic coating composition including unsaturated moieties forming a surface coating, and introducing a vapour phase reactive intermediate species based on a Group 14 or Group 15 element from the Periodic Table of Elements to the substrate whereupon the reactive intermediate species is able to react with a number of the unsaturated moieties in the coating composition thereby chemically modifying the surface coating. Also disclosed is a surface-modified substrate obtained or obtainable by the method, and uses thereof in the fabrication of MEMS and IC devices.</p> |
申请公布号 |
EP2748352(A1) |
申请公布日期 |
2014.07.02 |
申请号 |
EP20120753162 |
申请日期 |
2012.08.15 |
申请人 |
UNIVERSITY COURT OF THE UNIVERSITY OF ST ANDREWS |
发明人 |
HAEHNER, GEORG;ADAMKIEWICZ, MALGORZATA;O'HAGAN, DAVID |
分类号 |
C23C16/30;B82Y30/00;C23C16/455 |
主分类号 |
C23C16/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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