发明名称 PICK-UP DEVICE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要 <p>The present invention relates to a pick-up device for equipment to manufacture a semiconductor and, more specifically, to a pick-up device for equipment to manufacture a semiconductor capable of adjusting pitches of a plurality of pickers as a link is widen in a transversal direction to be lifted and fallen depending on the lifting and falling of a movable bar by using a V-shaped link whose one end is fixed to the movable bar which is lifted and fallen by a motor. The pick-up device for equipment to manufacture the semiconductor according to an embodiment of the present invention comprises a main frame in which a first guide hole is formed on both ends in a width direction and a second guide hole is formed on the rear surface in a longitudinal direction; a driving unit installed on the top of the main frame; a movable bar; a guide unit having a second guide member and a third guide member; a picker block unit installed in the guide unit and having a plurality of picker blocks; and a link.</p>
申请公布号 KR101413149(B1) 申请公布日期 2014.07.02
申请号 KR20130069577 申请日期 2013.06.18
申请人 NEONTECH CO., LTD. 发明人 HWANG, SEONG IL
分类号 H01L21/677;B65G47/91;B65G49/07 主分类号 H01L21/677
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