发明名称 CONTACTLESS CONVEYANCE APPARATUS
摘要 [Problem] To control a lift force acting on an object being conveyed by non-contact conveyance equipment in a non-contact manner. [Solution] A non-contact conveyance equipment that conveys an object in a non-contact manner, comprises a cup-shaped member including a concave portion, an air inlet, and an opening rim that faces the object, a fan provided inside the concave portion of the cup-shaped member, that rotates to suck air into the concave portion through the air inlet, the air forming a swirl flow in the concave portion, and an adjusting member provided at the cup-shaped member, that adjusts an amount of air sucked through the air inlet.
申请公布号 EP2660859(A4) 申请公布日期 2014.07.02
申请号 EP20110852567 申请日期 2011.12.27
申请人 LI, XIN;KAGAWA, TOSHIHARU 发明人 LI, XIN;KAGAWA, TOSHIHARU
分类号 H01L21/683;B25J15/06 主分类号 H01L21/683
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