Tunable capacitor

摘要

The invention relates to electronic device having an operation temperature range, wherein the electronic device comprises a tunable capacitor (CST) comprising a first electrode (BE), a second electrode (TE), and a dielectric (FEL) arranged between the first electrode (BE) and the second electrode (TE). The dielectric (FEL) comprises dielectric material (FEL) having a value of a relative dielectric constant (∈r) varying at least within the operation temperature range. The electronic device further comprises a temperature varying means (RES) being thermally coupled to the tunable capacitor for providing a temperature of the dielectric (FEL) causing a predetermined capacitance of the tunable capacitor (CST). The invention, which relies on the idea of varying temperature to vary a capacitance of a capacitor stack, provides an alternative tunable capacitor type for the known types. Advantageous embodiments feature high-tuning ratio, small device area, and stable capacitance value in case the temperature is well controlled. The invention further relates to a semiconductor device comprising the electronic device in accordance with the invention, to an electronic circuit comprising such electronic device, and to a method of manufacturing such electronic device.

主权项

1. An electronic device having an operation temperature range, the electronic device comprising:
a tunable capacitor comprising a first electrode, a second electrode, and a dielectric arranged between the first electrode and the second electrode, wherein the dielectric comprises dielectric material having a value of a relative dielectric constant varying at least within the operation temperature range; a temperature varying means being thermally coupled to the tunable capacitor for controlling the temperature of the dielectric thereby causing a predetermined capacitance of the tunable capacitor, the temperature varying means including a resistive element for carrying current; a controller being coupled to the resistive element and being arranged for controlling the temperature of the dielectric by steering the current through the resistive element; and a temperature sensor for measuring an actual value of the temperature of the dielectric material, wherein the controller is arranged for receiving from the temperature sensor a temperature signal indicative of the actual value of the temperature, the controller being further arranged for receiving a desired temperature signal indicative for a desired temperature, and wherein the controller is arranged for controlling the temperature to decrease an absolute difference between the temperature signal and the desired temperature signal.