Single-pass imaging apparatus with image data scrolling for improved resolution contrast and exposure extent

摘要

An imaging (e.g., lithographic) apparatus for generating an elongated concentrated scan image on an imaging surface of a scan structure (e.g., a drum cylinder) that moves in a process (cross-scan) direction. The apparatus includes a spatial light modulator having a two-dimensional array of light modulating elements for modulating a two-dimensional light field in response to predetermined scan image data, and an anamorphic optical system is used to anamorphically image and concentrate the modulated light onto an elongated imaging region defined on the imaging surface. To avoid smearing, movement of the imaging surface is synchronized by an image position controller with the modulated states of the light modulating elements such that image features of the scan image are scrolled (moved in the cross-scan direction) at the same rate as the cross-scan movement of the imaging surface, whereby the features remain coincident with the same portion of the imaging surface.

主权项

1. An apparatus for generating an elongated concentrated scan image in response to predetermined scan image data, the apparatus comprising:
a spatial light modulator including a plurality of light modulating elements arranged in a two-dimensional array, each light modulating element including a light modulating structure and an associated control cell for storing an associated image data bit value, said each light modulating element being disposed such that said light modulating structure receives an associated light portion of a substantially uniform two-dimensional homogenous light field and is controlled according to the associated image data bit value between a first modulated state and a second modulated state, wherein when the light modulating structure of said each modulating element is in said first modulated state said each modulating element directs said received associated light portion in a corresponding predetermined direction, and when said light modulating structure of said each modulating element is in said second modulated state, said received associated light portion is prevented from passing along said corresponding predetermined direction by said each modulating element; an anamorphic optical system positioned to receive a modulated light field including modulated light portions directed by each of the plurality of light modulating elements disposed in the first modulated state, and configured to generate an associated anamorphically concentrated light field in response to said receive modulated light field; a scan structure having a movable imaging surface and positioned relative to the anamorphic optical system such that the anamorphically converged light field forms said elongated concentrated scan image on an elongated imaging region defined on the imaging surface; and an image position controller including means for synchronizing a cross-scan movement of the imaging surface with the modulated states of said plurality of light modulating elements in accordance with said predetermined scan image data by causing image data bit values to shift between predetermined selected modulating elements of the plurality of light modulating elements such that an image feature of said elongated concentrated scan image scrolls in the cross-scan direction at a same rate as said cross-scan movement of the imaging surface, wherein the anamorphic optical system includes a cross-process optical subsystem including first and second cylindrical or acylindrical focusing lenses arranged to image and project said received light portions onto the elongated imaging region in a cross-process direction, and wherein the anamorphic optical system further comprises a process-direction optical subsystem including a third cylindrical or acylindrical focusing lens arranged to focus said light portions received from the cross-process optical subsystem onto the elongated imaging region in a process direction.