Carburizing treatment apparatus and method

摘要

In order to provide a further uniform carburizing treatment to an article to be treated, a carburizing treatment apparatus which performs carburizing treatment by heating the article to be treated in a treatment chamber, the inside of which is under reduced pressure and in a carburizing gas atmosphere, includes a temperature measurement means for measuring temperatures in a plurality of regions inside the treatment chamber and a temperature adjustment means for individually adjusting temperatures in the plurality of regions on the basis of measurement results of the temperature measurement means so that the article to be treated is given a uniform carburizing treatment.

主权项

1. A carburizing treatment method of a carburizing treatment apparatus for performing a uniform carburizing treatment by heating an article to be treated in a treatment chamber, the treatment chamber having an inside under reduced pressure and containing a carburizing gas atmosphere,
wherein the carburizing treatment apparatus comprises: a temperature measurement device configured to measure temperatures in a plurality of regions in the treatment chamber, and a temperature adjustment device configured to individually control the plurality of regions based on the temperature measurement results obtained by the temperature measurement device; the plurality of regions includes a forward region in a direction the article to be treated is carried toward in the treatment chamber, a backward region, and an intermediate region positioned between the forward region and the backward region; the plurality of regions is sized and positioned such that while the article to be treated is stopped in the treatment chamber, the article to be treated is located in each region of the plurality of the regions; the forward region, the intermediate region and the backward region each includes a plurality of heaters; the plurality of heaters is positioned inside the treatment chamber so as to surround the article to be treated both from above the article to be treated and below the article to be treated in at least one of the plurality of the regions, and wherein the carburizing treatment method comprises: a step for individually measuring temperatures in the treatment chamber of the forward region, the intermediate region and the backward region by the temperature measurement device, and a step for individually adjusting the temperatures of the forward region, the intermediate region and the backward region by adjusting temperatures of the plurality of heaters with the temperature adjustment device based on a measurement result of the temperature measurement device by using PID values, the PID value depending on a loaded mass of the article to be treated at each of the plurality of regions so that the article to be treated inside the treatment chamber is provided with the uniform carburizing treatment.