Active damping of high speed scanning probe microscope components

摘要

A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes.

主权项

1. A method, comprising:
maintaining a feedback loop that maintains a distance relationship between a sample being measured and a support in a sensing system, said feedback loop operating to maintain said distance relationship between said sensing system and said sample that is supported by the support, said maintaining using a first actuator; measuring momentum-causing actions that are induced to the support structure by actions of components of said sensing system other than said first actuator; and using a second actuator, separate from the first actuator, to compensate said momentum-causing actions to thereby damp said momentum-causing actions.