Multiple degree of freedom actuator

摘要

A multiple degree of freedom actuator can have at least one first MEMS actuator configured to move a platform in translation and at least one second MEMS actuator configured to move the platform in a different direction, e.g., tangentially. The first MEMS actuator(s) can facilitate autofocus and/or zoom, for example. The second MEMS actuator(s) can facilitate optical image stabilization (OIS), for example.

主权项

1. A device comprising:
at least one first MEMS actuator configured to move a platform in translation along a first axis; and at least one second MEMS actuator configured to move the first MEMS actuator in a direction that is generally perpendicular to the first axis; wherein at least one of the at least one first and second MEMS actuators comprises a fixed frame and a moveable frame, at least one of the movable frame and the fixed frame being deployed at an angle relative to a plane of the device and the moveable frame being rotatable relative to the fixed frame about a hinge line lying in the plane of the device and passing through a portion of the fixed frame, and wherein the second MEMS actuator(s) define a plane and at least a portion of each first MEMS actuator is deployed to a position out of the plane to define a rotational comb drive.