<p>A micro pump of the present invention comprises a passage forming substrate having an inlet and an outlet; an upper substrate, which is connected to the passage forming substrate and has a first hole connected to the inlet and a second hole connected to the outlet; and an adhesive member. The adhesive member is arranged between the passage forming substrate and the upper substrate and bonds the passage forming substrate and the upper substrate. The adhesive member has a first valve for opening and closing the inlet and a second valve for opening and closing the outlet.</p>
