Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots

摘要

Methods of correction of rotational and linear misalignment in multi-link robots are provided. The method allows for precise orientation of an end effector to put or pick substrates at a target destination by correcting for both positional and rotational orientation errors. The method rotates a boom linkage to a position adjacent to the target destination, corrects for linear and rotational error by rotating a boom linkage as well as an upper arm link as well as extending or retracting a wrist member. Systems including long boom linkages are disclosed. Numerous other aspects are provided.

主权项

1. A method of correcting misalignment in a robot, comprising:
providing a robot apparatus having a boom linkage, an upper arm link coupled to the boom linkage, a forearm link coupled to the upper arm link, and a wrist member coupled to the forearm link, and an end effector coupled to the wrist member; providing the upper arm link to rotate in a X-Y plane relative to the boom linkage about a second rotational axis offset and spaced from a first rotational axis, the upper arm link rotates around the second rotational axis, so the upper arm link, the forearm link, the wrist member, and the end effector rotate about the second rotational axis in unison such that in unison sweeping involves no relative rotation between the upper arm link, the forearm link, and the wrist member; positioning the boom linkage at a location adjacent to a target location; translating the end effector to near the target location; determining an extent of offset; correcting linear positional misalignment, at least in part, by rotation of the boom linkage, and correcting rotational misalignment.