Telemetric sensing using micromachined ultrasonic transducer

摘要

Implementations of a cMUT have a telemetric antenna operative to telemetrically transmit an output signal generated by the cMUT in reception mode (RX). The cMUT generates the output signal by converting a received energy applied on the cMUT. The received energy may be an acoustic wave or a low-frequency pressure signal. The acoustic wave may be generated by a separate acoustic energy source. The cMUT may form a modulated signal using a carrier signal modulated with the output signal, and telemetrically transmit the modulated signal carrying the output signal to increase efficiency. The antenna may also receive an input signal from outside to telemetrically power on the cMUT.

主权项

1. A capacitive micromachined transducer (cMUT) system comprising:
a cMUT operative in a reception mode (RX) to convert an external energy applied on the cMUT to an output signal; an AC signal source on a first side of the cMUT for generating a carrier signal that passes across an electrode gap of the cMUT to a second side of the cMUT, so that a carrier frequency of the carrier signal is modulated with the output signal, that is output by the cMUT, to become a modulated signal carrying the output signal; and an antenna on the second side of the cMUT to wirelessly transmit the modulated signal carrying the output signal.