Piezoelectric actuator, head gimbal assembly including the same and method of forming the same

摘要

According to embodiments of the present invention, a piezoelectric actuator is provided. The piezoelectric actuator includes a shear mode piezoelectric material including a first arm and a second arm intersecting each other, the shear mode piezoelectric material having a polarization direction oriented at least substantially along a length of the first arm, wherein the shear mode piezoelectric material has a first surface and a second surface opposite to the first surface, the first surface and the second surface being adapted to undergo a shear displacement relative to each other along an axis at least substantially parallel to the polarization direction in response to an electric field applied between the first surface and the second surface in a direction at least substantially perpendicular to the polarization direction.

主权项

1. A piezoelectric actuator comprising:
a shear mode piezoelectric material comprising a first arm and a second arm intersecting each other, the shear mode piezoelectric material having a polarization direction oriented at least substantially along a length of the first arm, wherein the shear mode piezoelectric material has a first surface and a second surface opposite to the first surface, the first surface and the second surface being adapted to undergo a shear displacement relative to each other along an axis at least substantially parallel to the polarization direction in response to an electric field applied between the first surface and the second surface in a direction at least substantially perpendicular to the polarization direction.