Thermal air flow sensor

摘要

In a thermal air flow sensor according to the invention, a hollow formed in a detecting element is communicated with a circuit chamber, in which driving circuit parts of the detecting element are mounted, or an intake duct exterior. Thereby, pressure in the hollow balances with pressure on the outside. Also, since the circuit chamber is provided to be isolated from a detection chamber, in which a detecting part of the detecting element is arranged, that is, a passage chamber, through which air being a measuring object flows, air flowing in the passage chamber can be restrained from flowing into the hollow to have an influence on flow output characteristics.

主权项

1. A thermal air flow sensor having a hollow in a portion of a detecting element for detection of an air flow rate, wherein the detecting element is fixed to a sensor structural member so that the hollow is not directly communicated with a detection chamber positioned on a reverse surface to the hollow, and a communicating passage is provided to communicate the hollow to a circuit chamber, in which a driving circuit of the detecting element is mounted, or an exterior of an intake duct, in which the thermal air flow sensor is installed.