发明名称 |
Removing a sheet from the surface of a melt using elasticity and buoyancy |
摘要 |
Embodiments related to sheet production are disclosed. A melt of a material is cooled to form a sheet of the material on the melt. The sheet is formed in a first region at a first sheet height. The sheet is translated to a second region such that it has a second sheet height higher than the first sheet height. The sheet is then separated from the melt. A seed wafer may be used to form the sheet. |
申请公布号 |
US8764901(B2) |
申请公布日期 |
2014.07.01 |
申请号 |
US201113039808 |
申请日期 |
2011.03.03 |
申请人 |
Varian Semiconductor Equipment Associates, Inc. |
发明人 |
Kellerman Peter L.;Sun Dawei;Helenbrook Brian;Harvey David S. |
分类号 |
C30B15/06;C30B15/00;C30B15/20;C30B15/22 |
主分类号 |
C30B15/06 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method of sheet production comprising:
cooling a melt of a material to form a sheet of said material on a surface of said melt in a first region at a first sheet height; translating said sheet horizontal to said surface of said melt and raising a first portion of said sheet vertically from said surface of said melt such that said first portion of said sheet is disposed in a second region and a second portion of said sheet is disposed in said first region, wherein said first portion of said sheet has a second sheet height, said second portion of said sheet has a first sheet height, said first sheet height being lower than said second sheet height, and said first portion of said sheet being parallel to said second portion of said sheet; and separating said sheet from said melt in said second region at said second sheet height. |
地址 |
Gloucester MA US |