SEMICONDUCTOR SUBSTRATE, AND METHOD THEREOF

摘要

A semiconductor substrate comprises a growth substrate; a buffer layer that is installed on the growth substrate; a first nitride semiconductor layer that is installed on the growth substrate; a roughness structure that is installed on the first nitride semiconductor layer; a plurality of blocking patterns that is formed on either the buffer layer or the roughness structure; a second nitride semiconductor layer that is installed on the roughness structure; and a conductive semiconductor layer that is installed on the second nitride semiconductor layer.