Area-efficient capacitor using carbon nanotubes

摘要

An on-chip decoupling capacitor is disclosed. One or more carbon nanotubes are coupled to a first electrode of the capacitor. A dielectric skin is formed on the one or more carbon nanotubes. A metal coating is formed on the dielectric skin. The dielectric skin is configured to electrically isolate the one or more carbon nanotubes from the metal coating.

主权项

1. A method of forming an on-chip decoupling capacitor, comprising:
forming at least one trench in a first electrode of the capacitor; disposing one or more carbon nanotubes on the at least one trench of the first electrode of the capacitor; forming a dielectric skin on the one or more carbon nanotubes; and forming a metal coating on the dielectric skin, wherein the dielectric skin electrically isolates the one or more carbon nanotubes from the metal coating; and forming at least one prong on a second electrode that extends into the at least one trench of the first electrode.