发明名称 Arrangement and method to sense flow using mechanical stress microsensors
摘要 A sensor module includes a MEMs sensor device and a processing circuit. The MEMs sensor device is operable to determine a fluid flow induced mechanical force on a first flow control device connective element. The processing circuit is operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force. The processing circuit is configured to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element.
申请公布号 US8764529(B2) 申请公布日期 2014.07.01
申请号 US200812220848 申请日期 2008.07.29
申请人 Siemens Industry, Inc. 发明人 Cook Matthew D.;Anderson Dean B.
分类号 F24F11/00 主分类号 F24F11/00
代理机构 代理人
主权项 1. A sensor module, comprising: a MEMs sensor device operable to determine a fluid flow induced mechanical force on a first flow control connective element; and a processing circuit operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force, the processing circuit operable to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element; wherein the flow control device comprises a damper member configured to control a flow of fluid; wherein the first flow control connective element is a rotatable shaft coupled to a gear assembly and an electric motor, the electric motor configured to drive the gear assembly and the rotatable shaft, wherein the rotatable shaft is coupled to the damper member such that rotation of the rotatable shaft about a shaft axis results in movement of the damper member; wherein the processing circuit is further configured to generate the fluid flow measurement value by selecting one of a plurality of relationships between the fluid flow induced mechanical force information and fluid flow, the selection of one of the plurality of relationships based on the position information, and wherein selecting one of the plurality of relationships comprises selecting one of a plurality of piecewise linear functions.
地址 Alpharetta GA US